Today, many industries require permanent identification marks, such as serialized part numbers. Currently, substrates can be serialized by either Photolithography and etching or by laser scribing.

The photolithography process is done using a custom photo mask and creation of the serialized text by either adding or etching metals from fields in patterned areas. The photolithography process will require a photo mask for every unique batch of serialized parts. The line edge quality of the serialization will be the best, but can often be the most expensive, manufacturing method due to the need for masks. Line features and depth of feature are tightly controlled to within 0.0005" (12.7µm) level. Characters can be as small as 0.0035" (89.9µm) in height and width features as thin as 0.001" (25.4µm). In most cases where the serialization will be seen by eye unassisted, these features will usually be much larger.


The laser scribing process is performed by scribing into select metallized areas or directly into the substrate surface. This process will not require any additional tooling or photo mask, however a CAD file will need to be generated to produce every unique batch of serialized parts. The smallest characters possible are a minimum of 0.020" (0.508mm) in height and 0.010" (0.254mm) in width with 0.003" (76.2µm) wide line features. In most cases where these features are significantly larger, laser scribing may be a more cost effective approach to part serialization.



Laser scribing into metal

Laser scribing into metal

Laser scribing into TaN/Ni/TiW metal

Laser scribing into TaN/Ni/TiW metal

Laser scribing

Laser scribing

Laser scribing

Laser scribing

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