Material Specs

Specifications are offered as an assistance to engineers and purchasing professionals in the design and procurement of thin-film circuit substrates.

Properties Polished High Density 996 Aluminum Oxide Asfired Superstrate 996 Aluminum Oxide Superstrate TPS Beryllium Oxide Aluminum Nitride Fused Silica Quartz Sapphire (Crystalline) Polished Titanates Ferrites & Garnets
Chemical Composition Al2O3 Al2O3 Al2O3 BeO AlN SiO2 A/C plane
—Al2O3
   
Purity 99.6% 99.6% 99.6% 99.5% 98% 100% 100%    
Color White White White White Tan Transparent Transparent Cream Gray
Nominal Density 3.87g/cm3 3.87g/cm3 3.95g/cm3 2.85g/cm3 3.28g/cm3 2.2g/cm3 3.97g/cm3    
Surface Finish (Polished) CLA < 1.0µ"
(25nm)
n/a < 1.0µ"
(25nm)
2.0–4.0µ"
(50–100nm)
< 2.0µ"
(50nm)
60/40 Optical < 1.0µ"
(25nm) CLA
< 3.0µ"
(76nm)
< 16.0µ"
(400nm)
Surface Finish (Asfired) CLA n/a 3–4µ"
(76–101 nm)
n/a n/a n/a n/a n/a n/a n/a
Camber 0.0003–0.0005" 0.002" n/a 0.0003–0.0005" 0.0003–0.0005" 0.0003–0.0005" 0.0003–0.0005" 0.002" 0.002"
Camber 76nm / 152nm 0.0508mm n/a 76nm / 152nm 76nm / 152nm 76nm / 152nm 76nm / 152nm 0.0508mm 0.0508mm
Thickness 0.004–0.080"
(0.100–2.0mm)
0.005–0.025"*
(0.127–0.635mm)
n/a 0.005–0.025"*
(0.127–0.635mm)
0.004–0.080"
(0.100–2.0mm)
0.004–0.025"*
(0.100–0.635mm)
0.004–0.025"*
(0.100–0.635mm)
0.005–0.025"*
(0.127–0.635mm)
0.010–0.025"
(0.254–0.635mm)
Thickness Tolerance (±) 0.0005"
(0.0127mm)
0.001"
(0.0254mm)
n/a 0.0005"
(0.0127mm)
0.0005"
(0.0127mm)
0.0005"
(0.0127mm)
0.0005"
(0.0127mm)
0.0005"
(0.0127mm)
0.0005"
(0.0127mm)
Process Sizes (L&W) 1.0–4.0"
(25.4–101.6mm)
1.0–6.0"
(25.4–152.4mm)
n/a 1.0–4.00"
(25.4–101.6mm)
1.0–4.00"
(25.4–101.6mm)
1.0–3.00"
(25.4–76.2mm)
1.0–2.25"
(25.4–57.15mm)
1.0–2.25"
(25.4–57.15mm)
1.0–2.25"
(25.4–57.15mm)
Coefficient of Thermal Expansion (CTE) 7.0–8.3 x 106
(25–1000°C)
7.0–8.3 x 106
(25–1000°C)
8.2 x 106
(25–1000°C)
9.0 x 106
(25–1000°C)
4.6 x 106
(25–300°C)
0.55 x 106
(20–320°C)
A plane
@ 25°C—5.3
   
Thermal Conductivity 26.9 Watts/m°K 26.9 Watts/m°K 35 Watts/m°K 285 Watts/m°K 170 Watts/m°K n/a Watts/m°K n/a    
Dielectric Constant (k) 9.9
@ 1 MHz
9.9
@ 1 MHz
10.0
@ 1 MHz
6.76
@ 1 MHz
8.6
@ 1 MHz
3.826
@ 1 MHz
11.5/9.3
@ 1 MHz †
36–180
@ 1 MHz
14.5–17.6
@ 1 MHz
Dissipation Factor (Loss Tangent) 0.0001
@ 1 MHz
0.0001
@ 1 MHz
0.0001
@ 1 MHz
0.0004
@ 1 MHz
0.001
@ 1 MHz
0.000015
@ 1 MHz
0.00086/0.0003
@ 1 MHz †
   
Dissipation Factor (Loss Tangent) 0.0002
@ 10 MHz
0.0002
@ 10 MHz

0.0001

@ 10 MHz

           
Q 5000
@ 1 GHz
5000
@ 1 GHz
5000
@ 1 GHz
  5000
@ 1 GHz
       
Hardness
(Rockwell)
87 87 87 60 n/a 7 Mohs 1800/2200A
Knoop
   
Flexural Strength 90 x 103
K lbs/in2
90 x 103
K lbs/in2
99 x 103
K lbs/in2
35 x 103
K lbs/in2
(3 pt. bend)
59 x 103
K lbs/in2
(4 pt. bend)
25 x 103
K lbs/in2
60 x 103
K lbs/in2
   
Compressive Strength 54 x 103
M lbs/in2
54 x 103
M lbs/in2
n/a n/a n/a 161 x 103
M lbs/in2
350 x 103
M lbs/in2
   
Grain Size < 1.0µm < 1.0µm < 1.0µm 14–22µm 5–7µm Amorphous single crystal    

* Additional thicknesses and tolerances available upon request.

† Value varies with orientation (“A” plane / “C” plane)

 

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